稀有金属材料与工程
稀有金屬材料與工程
희유금속재료여공정
RARE METAL MATERIALS AND ENGINEERNG
2009年
4期
565-569
,共5页
庄惠照%李保理%王德晓%申加兵%张士英%薛成山
莊惠照%李保理%王德曉%申加兵%張士英%薛成山
장혜조%리보리%왕덕효%신가병%장사영%설성산
纳米线%氨化%GaN
納米線%氨化%GaN
납미선%안화%GaN
nanowires%ammoniating%GaN
采用射频磁控溅射技术在硅衬底上制备Ga2O3/Nb薄膜,然后在900℃下于流动的氨气中进行氨化制备GaN纳米线.用X射线衍射(XRD)、透射电子显微镜(TEM)和高分辨透射电子显微镜详细分析了GaN纳米线的结构和形貌.结果表明:采用此方法得到的GaN纳米线有直的形态和光滑的表面,其纳米线的直径大约50nm,纳米线的长约几个微米.室温下以325nm波长的光激发样品表面,只显示出一个位于367 nm的很强的紫外发光峰.最后,简单讨论了GaN纳米线的生长机制.
採用射頻磁控濺射技術在硅襯底上製備Ga2O3/Nb薄膜,然後在900℃下于流動的氨氣中進行氨化製備GaN納米線.用X射線衍射(XRD)、透射電子顯微鏡(TEM)和高分辨透射電子顯微鏡詳細分析瞭GaN納米線的結構和形貌.結果錶明:採用此方法得到的GaN納米線有直的形態和光滑的錶麵,其納米線的直徑大約50nm,納米線的長約幾箇微米.室溫下以325nm波長的光激髮樣品錶麵,隻顯示齣一箇位于367 nm的很彊的紫外髮光峰.最後,簡單討論瞭GaN納米線的生長機製.
채용사빈자공천사기술재규츤저상제비Ga2O3/Nb박막,연후재900℃하우류동적안기중진행안화제비GaN납미선.용X사선연사(XRD)、투사전자현미경(TEM)화고분변투사전자현미경상세분석료GaN납미선적결구화형모.결과표명:채용차방법득도적GaN납미선유직적형태화광활적표면,기납미선적직경대약50nm,납미선적장약궤개미미.실온하이325nm파장적광격발양품표면,지현시출일개위우367 nm적흔강적자외발광봉.최후,간단토론료GaN납미선적생장궤제.
Single-crystalline GaN nanowires have been synthesized on Si(111) substrates by magnetron sputtering through ammoniating the Ga2O3/Nb films at 900℃ in a quartz tube. The as-prepared nanowires are confirmed as single crystalline GaN with wurtzite structure by X-ray diffraction (XRD), selected-area electron diffraction (SAED) and high-resolution transmission electron microscopy (HRTEM). Transmission electron microscopy (TEM) shows that the GaN nanowires are straight and smooth, and possess the diameters of about 50 nm and lengths up to several microns. When excited by 325 nm helium-cadmium (He-Cd) laser light at room temperature, the GaN nanowires only have a strong ultraviolet luminescence peak located at 367 nm, owing to GaN band-edge emission. Finally, the growth mechanism of GaN nanowires is discussed briefly.