声表面波气敏传感器敏感薄膜厚度的研究
성표면파기민전감기민감박막후도적연구
Study on the Thickness of Sensitive Layer of Surface Acoustic Wave Gas Sensor
  • 万方数据
    压电与声光 압전여성광
    PIEZOELECTRICS & ACOUSTOOPTICS
    2009年 4期 461-463 ,共3页

    李淑红%赵启大%廖同庆%廖继平

    리숙홍%조계대%료동경%료계평

    声表面波%敏感薄膜%最佳薄膜厚度 聲錶麵波%敏感薄膜%最佳薄膜厚度
    성표면파%민감박막%최가박막후도
    surface acoustic wave%sensitive layer%optimal layer thickness
    理论上研究了声表面波气敏传感器敏感薄膜厚度对系统灵敏度的影响.分析了气体浓度、敏感薄膜厚度、敏感薄膜密度对系统灵敏度的共同影响.提出了最佳薄膜厚度的概念,并给出了相应的关系式.
    이론상연구료성표면파기민전감기민감박막후도대계통령민도적영향.분석료기체농도、민감박막후도、민감박막밀도대계통령민도적공동영향.제출료최가박막후도적개념,병급출료상응적관계식.
    Influence of sensitive layer of surface acoustic wave sensor on the sensitivity of system was researched theoretically. Total influence of gas concentration, thickness and density of sensitive layer to the sensitivity of system was also analyzed. Then the idea of optimization of the layer thickness was proposed and the corresponding formulas were presented.
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