纳米技术与精密工程
納米技術與精密工程
납미기술여정밀공정
NANOTECHNOLOGY AND PRECISION ENGINEERING
2004年
1期
32-37
,共6页
单学传%前田龙太郎%小林健%张国雄
單學傳%前田龍太郎%小林健%張國雄
단학전%전전룡태랑%소림건%장국웅
自敏感悬臂%扫描原子力显微镜%无损测量%微镜%微模
自敏感懸臂%掃描原子力顯微鏡%無損測量%微鏡%微模
자민감현비%소묘원자력현미경%무손측량%미경%미모
self-sensitive cantilever%scanning force microscope%nondestructive measurement%micro mirror%micro mold
介绍了一种新颖的扫描原子力显微(SFM)方法,它可用于微机械垂直面的无损测量,这是惯用的SFM和其他测量仪器无法实现的.除操作灵活外,本方法使用自敏感微小悬臂结构确定其自身的偏移.因此,这使得测量微小垂直镜面的反射面以及微模插入物内壁等微结构的特征时可以精确定位.本方法已成功地应用于测量微模长方形腔体的内壁和热压聚合物微镜的反射面,该微镜的尺寸是500 μm(长)×100 μm(宽)×200 μm(高).
介紹瞭一種新穎的掃描原子力顯微(SFM)方法,它可用于微機械垂直麵的無損測量,這是慣用的SFM和其他測量儀器無法實現的.除操作靈活外,本方法使用自敏感微小懸臂結構確定其自身的偏移.因此,這使得測量微小垂直鏡麵的反射麵以及微模插入物內壁等微結構的特徵時可以精確定位.本方法已成功地應用于測量微模長方形腔體的內壁和熱壓聚閤物微鏡的反射麵,該微鏡的呎吋是500 μm(長)×100 μm(寬)×200 μm(高).
개소료일충신영적소묘원자력현미(SFM)방법,타가용우미궤계수직면적무손측량,저시관용적SFM화기타측량의기무법실현적.제조작령활외,본방법사용자민감미소현비결구학정기자신적편이.인차,저사득측량미소수직경면적반사면이급미모삽입물내벽등미결구적특정시가이정학정위.본방법이성공지응용우측량미모장방형강체적내벽화열압취합물미경적반사면,해미경적척촌시500 μm(장)×100 μm(관)×200 μm(고).
This paper presents a novel scanning force microscope (SFM) for nondestructive measurement of tiny micromachined vertical surfaces, where conventional SFMs and other instruments cannot access without destruction. In addition to its access flexibility, the SFM uses a self-sensitive cantilever for sensing its own deflection. As a result, it can access tiny areas at restricted locations for measuring the features of microstructures, such as the reflecting surfaces of a tiny vertical mirror and the inside walls of a micro mold insert. The SFM has been successfully used in evaluating the inner walls of rectangular cavities on a micro mold and the reflecting surfaces of embossed polymer mirrors with a dimension of 500 μm long×100 μm wide×200 μm deep (high).
