CAJ | 학술논문

为了实现微机电系统微波信号滤波,开发了适用于微机电系统的小尺寸左右手复合传输线微波带阻滤波器,对该滤波器的原理、结构特点、加工工艺等进行了研究.根据左手材料理论,介绍了具有蛇形槽单元的滤波器结构.以蛇形槽结构的一个单元为例,对比传统插指电容左手单元结构,提取了蛇形槽的等效电路,并分析了蛇形槽结构单元的优点,即在相同的面积内,可以获得更大的等效电路参数.最后,结合溅射、光刻、电铸、刻蚀等MEMS技术,设计了器件的加工工艺.使用MEMS工艺,加工了主体尺寸5 mm×7 mm的器件.相移常数的仿真和实验结果表明,在高频带部分(2.1～5.2 GHz)的相移常数为负(左手区),相速度与群速度方向相反,左手区的相对带宽为82.7%.结果显示,与其他设计相比,本文设计的器件尺寸小,左手区的相对带宽大,可以提供更大的工作频带范围
위료실현미궤전계통미파신호려파,개발료괄용우미궤전계통적소척촌좌우수복합전수선미파대조려파기,대해려파기적원리、결구특점、가공공예등진행료연구.근거좌수재료이론,개소료구유사형조단원적려파기결구.이사형조결구적일개단원위례,대비전통삽지전용좌수단원결구,제취료사형조적등효전로,병분석료사형조결구단원적우점,즉재상동적면적내,가이획득경대적등효전로삼수.최후,결합천사、광각、전주、각식등MEMS기술,설계료기건적가공공예.사용MEMS공예,가공료주체척촌5 mm×7 mm적기건.상이상수적방진화실험결과표명,재고빈대부분(2.1～5.2 GHz)적상이상수위부(좌수구),상속도여군속도방향상반,좌수구적상대대관위82.7%.결과현시,여기타설계상비,본문설계적기건척촌소,좌수구적상대대관대,가이제공경대적공작빈대범위
In order to filtrate the microwave signals in micro electronic mechanical systems,amicro Composite Right/Left Handed(CRLH) transmission line band reject filter is presented,and the design theory, structure characteristics and fabrication process of the filter are also studied. According to the Left Handed Material (LHM) theory, the filter structure with a meander gap is introduced,and the equivalent circuit of the meander gap structure is obtained by comparing to the conventional interdigital capacitor structure. Then, the advantage of the meander gap structure is discussed by taking a cell of the meander gap as an example,and the results show that the equivalent circuit parameters in the meander gap structure are larger than that of the conventional interdigital capacitor structure. Finally, the fabrication process is introduced by combining different MEMS (Micro Electromechanical Systems) technologies, such as sputtering, lithography, electroplating and etching.By the MEMS technology,a band reject filter with the size of the main part of5 mm×7 mm is developed. The simulated and experimental results show that the phase shift constant of the band reject filter is negative at the high frequency (2.1-5.2 GHz, left handed region),and the phase velocity flows just to the opposite direction of the energy flow in the left region. Moreover, the relative pass bandwidth in a left handed region is 82.7%. Compared with other designs, this filter shows his advantages in small sizes and large working bands at the left handed region.