CAJ | 학술논문

对于"伺服电机+滚珠丝杠"驱动机构,摩擦、饱和和高频振动等非线性因素是实现大行程无超调高精度点位(PTP)控制的主要障碍.针对这种驱动系统,在根据刚体动力学计算得到的线性传递函数的基础上,设计了高增益PID闭环控制系统和输入滤波器束实现大行程的纳米定位.配置闲环控制系统的极点为负实轴上的多重极点,避免了摩擦力补偿和双模控制策略的使用.为了避免驱动器饱和所导致的闭环系统响应超调现象,基于数字低通滤波器设计了闭环输入信号.实验结果表明,该定位系统可以实现大行程无超调纳米精度点位控制,10 nm～100mm定位响应的稳态误差不超过±5 nm.
대우"사복전궤+곤주사강"구동궤구,마찰、포화화고빈진동등비선성인소시실현대행정무초조고정도점위(PTP)공제적주요장애.침대저충구동계통,재근거강체동역학계산득도적선성전체함수적기출상,설계료고증익PID폐배공제계통화수입려파기속실현대행정적납미정위.배치한배공제계통적겁점위부실축상적다중겁점,피면료마찰력보상화쌍모공제책략적사용.위료피면구동기포화소도치적폐배계통향응초조현상,기우수자저통려파기설계료폐배수입신호.실험결과표명,해정위계통가이실현대행정무초조납미정도점위공제,10 nm～100mm정위향응적은태오차불초과±5 nm.
For a DC-motor and ball-screw-drive table system,the nonlinearities such as friction,saturation and high frequency resonance are the major obstacles to the achievement of high-precision and longstroke point-to-point(PTP) positioning without overshoot.Based on the transfer function obtained according to rigid body dynamics of the ball screw mechanism,a high gain PID controller and an input filter was designed to realize long-range nanometer positioning.Parameters of the closed-loop control system were calculated by multi-poles placement so that neither friction compensation nor dual-mode control strategy was necessary.The input signal of the closed-loop system was designed based on digital low-pass filter to avoid large overshoot due to the actuator saturation.Experimental and simulated results demonstrate that the proposed system can achieve long-stroke nanometer positioning without producing any large overshoot,with the steady-state error within ± 5 nm in PTP positioning from 100 mm down to 10 nm.