半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2003年
11期
1145-1148
,共4页
康香宁%徐云%宋国峰%叶晓军%陈良惠
康香寧%徐雲%宋國峰%葉曉軍%陳良惠
강향저%서운%송국봉%협효군%진량혜
极小孔激光器%近场光学%脊形波导%聚焦离子束
極小孔激光器%近場光學%脊形波導%聚焦離子束
겁소공격광기%근장광학%척형파도%취초리자속
very-small-aperture laser%optical near field%ridge waveguide%focused ion beam
报道了一种窗口型的用于高分辨率近场光学存储领域的极小孔激光器.这种窗口结构的引入解决了出射端面处由于金属膜的存在而导致的pn结短路问题,同时一定程度上抑制了激光器腔面处的COD效应.简化了极小孔激光器的工艺,降低了制备难度,提高了激光器的输出特性.通过FIB设备制备出了小孔大小为400nm,工作电流在31mA时的出光功率约0.3mW的极小孔激光器.
報道瞭一種窗口型的用于高分辨率近場光學存儲領域的極小孔激光器.這種窗口結構的引入解決瞭齣射耑麵處由于金屬膜的存在而導緻的pn結短路問題,同時一定程度上抑製瞭激光器腔麵處的COD效應.簡化瞭極小孔激光器的工藝,降低瞭製備難度,提高瞭激光器的輸齣特性.通過FIB設備製備齣瞭小孔大小為400nm,工作電流在31mA時的齣光功率約0.3mW的極小孔激光器.
보도료일충창구형적용우고분변솔근장광학존저영역적겁소공격광기.저충창구결구적인입해결료출사단면처유우금속막적존재이도치적pn결단로문제,동시일정정도상억제료격광기강면처적COD효응.간화료겁소공격광기적공예,강저료제비난도,제고료격광기적수출특성.통과FIB설비제비출료소공대소위400nm,공작전류재31mA시적출광공솔약0.3mW적겁소공격광기.
A windowed very-small-aperture laser (VSAL) source for use in high-resolution near field optical data storage is fabricated.The windowed regions are introduced to avoid shorting the pn junction with metal coating and suppress the COD effect.It facilitates producing VSAL by simplified technology and improves the laser performance.A VSAL with 400nm small aperture is demonstrated by focused ion beam (FIB) and the output power is 0.3mW at 31mA.