CAJ | 학술논문

采用直流磁控溅射方法在室温下制备厚度为130 nm的ITO和Ag-ITO薄膜,并在大气环境中不同温度下退火1 h,测试其XRD谱和近紫外-可见光透射谱. 利用(211)和(222)衍射峰求得两种薄膜的晶格常数,并分析了掺Ag和退火对ITO薄膜晶格常数、结晶度和透射率的影响. 结果表明: 晶格常数随退火温度的升高而减小,且掺Ag后晶格进一步收缩;两种薄膜经高温退火后在可见光段具有相近的透射率,未退火和低温退火的Ag-ITO薄膜透射率明显低于相同条件处理的ITO薄膜.
채용직류자공천사방법재실온하제비후도위130 nm적ITO화Ag-ITO박막,병재대기배경중불동온도하퇴화1 h,측시기XRD보화근자외-가견광투사보. 이용(211)화(222)연사봉구득량충박막적정격상수,병분석료참Ag화퇴화대ITO박막정격상수、결정도화투사솔적영향. 결과표명: 정격상수수퇴화온도적승고이감소,차참Ag후정격진일보수축;량충박막경고온퇴화후재가견광단구유상근적투사솔,미퇴화화저온퇴화적Ag-ITO박막투사솔명현저우상동조건처리적ITO박막.
ITO and Ag-ITO thin films with a thickness of 130 nm were respectively deposited on glass substrates at room temperature,and post annealed in atmosphere for 1 h. The microstructure and transmittance spectra of all the samples were measured by X-ray diffraction (XRD) and ultraviolet-visible spectrophotometry,respectively. The lattice constants in the normal direction of the crystal faces (211) and (222) of all the films were calculated. The lattice constants were decreased with the increase of annealing temperature and the lattice was further distortion found after Ag doping in ITO matrix. The ITO and Ag-ITO films have almost the same transmittance in the visible range at high annealing temperatures. But the transmittances of the two kinds of films were quite different at lower annealing temperatures. The influences of annealing and Ag doping on lattice constant,crystallinity and transmittance of ITO films were also discussed.