CAJ | 학술논문

离子束加工(Ion Beam Figuring,IBF)去除函数对加工残差具有重要的影响,而加工残差引起的表面散射则导致光学性能发生变化.为了减小加工残差对光学性能的影响,利用基于CCOS成形原理的离子束加工仿真程序对光学镜面进行修形,分析不同去除函数宽度对散射损失(Ratio of Scattering Loss,RSL)指标的影响.通过研究可知,随着去除函数宽度的减小,加工残差对散射损失的影响越来越小.因此,根据加工残差对RSL指标的影响程度以及RSL指标要求,可以合理选择去除函数宽度,从而在满足面形精度的同时,优化加工工艺.
리자속가공(Ion Beam Figuring,IBF)거제함수대가공잔차구유중요적영향,이가공잔차인기적표면산사칙도치광학성능발생변화.위료감소가공잔차대광학성능적영향,이용기우CCOS성형원리적리자속가공방진정서대광학경면진행수형,분석불동거제함수관도대산사손실(Ratio of Scattering Loss,RSL)지표적영향.통과연구가지,수착거제함수관도적감소,가공잔차대산사손실적영향월래월소.인차,근거가공잔차대RSL지표적영향정도이급RSL지표요구,가이합리선택거제함수관도,종이재만족면형정도적동시,우화가공공예.
The removal function in ion beam figuring (IBF) exerts great influence on the fabrication residual error of optical surface, so that the performance of optical surface is changed because of the surface scattering induced by the fabrication residual error. In order to reduce the influence of the fabrication residual. error on the optical performance, the IBF simulation procedure based on the computer controlled optical surfacing (CCOS) technique was used in surfacing the optical mirrors, and the influence of the removal function width on the ratio of scattering loss (RSL) was analyzed. It was shown that the influence of the fabrication residual error on the RSL declines with decrease of the removal function width. Thus the removal function width can be chosen reasonably according to the influence of the fabrication residual error on the RSL and the requirement of RSL index, and the processing technique can be optimized under the condition of satisfying the surface accuracy requirement of the optical mirrors.