CAJ | 학술논문

针对激光直写光刻系统设计整形衍射光学元件（DOE），对写入焦斑的整形进行了研究。提出对不同焦距写入物镜下的焦斑，利用同一个DOE加以整形的方法。模拟表明:整形后焦斑的面形和边缘显著改善，衍射效率高于实用指标，提供一种改善系统分辨能力的有效途径。
침대격광직사광각계통설계정형연사광학원건（DOE），대사입초반적정형진행료연구。제출대불동초거사입물경하적초반，이용동일개DOE가이정형적방법。모의표명:정형후초 반적면형화변연현저개선，연사효솔고우실용지표，제공일충개선계통분변능력적유효도경。
The diffractive optical elements (DOE) with shaping the focused spot for laser writing system are designed , while discussing their performances for shaping laser writing spot. An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented. The simulating results indicate that the spot-shaped sizes is only more twice than the diffraction limited spot sizes under this system, its diffraction efficiency is about 71.38% and the edges of the uniform area become dramatically sharper than the result without DOE.