CAJ | 학술논문

利用无机络合溶胶-凝胶法制备多孔ZnO薄膜,同时利用多种测试手段对薄膜的晶体结构、表面形貌、多孔和光学性能进行了研究.XRD和SEM的测试结果表明,ZnO薄膜的晶体结构为六方纤锌矿,薄膜表面呈多孔状.由孔径分布曲线得出薄膜的孔主要集中在介孔2.02nm和4.97nm;500℃煅烧得到的ZnO薄膜的比表面积是27.57m2/g;在不同温度下煅烧的薄膜在可见光区域透射率均高于85%,光学带宽为3.25eV.
이용무궤락합용효-응효법제비다공ZnO박막,동시이용다충측시수단대박막적정체결구、표면형모、다공화광학성능진행료연구.XRD화SEM적측시결과표명,ZnO박막적정체결구위륙방섬자광,박막표면정다공상.유공경분포곡선득출박막적공주요집중재개공2.02nm화4.97nm;500℃단소득도적ZnO박막적비표면적시27.57m2/g;재불동온도하단소적박막재가견광구역투사솔균고우85%,광학대관위3.25eV.
Porous ZnO films are synthesized by inorganic chelating sol-gel method,which is a novel sol-gel technique using zinc nitrate as starting materials and citric acid as the chelating reagent.The crystal structure,surface morphology,porous and optical properties of the deposited films are investigated.X-ray diffraction pattern analysis shows that crystal structure of the ZnO films is hexagonal wurtzite.Scanning electron microscopy (SEM) shows that the ZnO film is porous.The curve of pore size distribution has two peak values at about 2.02nm and 4.97nm and BET surface area of the ZnO film is 27.57m2/g.In addition,the transmittance spectrum gives a high transmittance of 85% in the visible region and optical bandgap of the ZnO film (fired at 500℃) is 3.25eV.