CAJ | 학술논문

表征了新合成的热光聚合物bisphenol A-aldehyde resin (BPA-resin)的独特性质.并且利用光刻和反应离子刻蚀技术(RIE)制备成功BPA-resin 聚合物的单模条波导.实验结果表明,对于TE和TM偏振,该聚合物波导在1.31 μm和1.55 μm波长下分别有低达0.43 dB/cm和0.51 dB/cm的传播损耗.在上述波长下,波导的低偏振相关损耗 (PDL)小于0.1 dB/cm.因此,是制备可调热光器件的良好导波模快.
표정료신합성적열광취합물bisphenol A-aldehyde resin (BPA-resin)적독특성질.병차이용광각화반응리자각식기술(RIE)제비성공BPA-resin 취합물적단모조파도.실험결과표명,대우TE화TM편진,해취합물파도재1.31 μm화1.55 μm파장하분별유저체0.43 dB/cm화0.51 dB/cm적전파손모.재상술파장하,파도적저편진상관손모 (PDL)소우0.1 dB/cm.인차,시제비가조열광기건적량호도파모쾌.
The unique characteristics of newly synthesized thermo-optical polymer, bisphenol A-aldehyde resin (BPA-resin) has been presented. And the single-mode channel waveguides based on BPA-resin polymer were fabricated using photolithography and reactive ion etching (RIE) technique. The experimental results exhibit that the polymer waveguide has a low propagation loss of 0.43 dB/cm and 0.51 dB/cm at a wavelength of 1.31 μm and 1.55 μm, respectively, for both TE and TM polarizations. The low polarization dependence loss (PDL) of the waveguide was less than 0.1 dB/cm at above wavelengths, which can be applied in thermal-optical tuned devices.