等离子体科学和技术(英文版)
等離子體科學和技術(英文版)
등리자체과학화기술(영문판)
PLASMA SCIENCE & TECHNOLOGY
2004年
2期
2233-2236
,共4页
陈俊芳%赵文锋%吴先球%樊双莉%符斯列
陳俊芳%趙文鋒%吳先毬%樊雙莉%符斯列
진준방%조문봉%오선구%번쌍리%부사렬
inductively coupled plasma%ion density distribution%angmuir probe
The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa,27 Pa and 53 Pa in the reaction chamber, different radio-frequency powers and different positions.The result indicates that the ion density decreases as the pressure increases, and increases as the power decreases. The ion density of axial position z = 0 achieves 5.8×10 10 on the center of coil under the power of 200 w and pressure of 9 Pa in the reaction chamber.
