CAJ | 학술논문

提出了一种干涉图预处理的新方法.该方法利用数学形态学的方法对干涉图进行有效区域的边缘提取,利用二维快速傅里叶变换迭代法对干涉图进行区域延拓,并采用非加权离散余弦变换最小二乘算法对干涉图进行波面统一,最终恢复出被测物体的表面面形,为后续结果分析奠定了基础.对一个实际SiO_2薄膜样片进行了干涉图的预处理.结果表明,通过该算法得到的干涉图预处理结果,与Zygo干涉仪的分析测试结果基本一致.
제출료일충간섭도예처리적신방법.해방법이용수학형태학적방법대간섭도진행유효구역적변연제취,이용이유쾌속부리협변환질대법대간섭도진행구역연탁,병채용비가권리산여현변환최소이승산법대간섭도진행파면통일,최종회복출피측물체적표면면형,위후속결과분석전정료기출.대일개실제SiO_2박막양편진행료간섭도적예처리.결과표명,통과해산법득도적간섭도예처리결과,여Zygo간섭의적분석측시결과기본일치.
The modern interferometry measurment features high precision and non-contact, which makes it widely used. As an essential part of the measruement, apre-processing of interferogram was proposed, and it included edge identification based on mathematical morphology, regional extension based on 2-D fast fourier transformation (FFT), as well as unwrapped and wrapped phase based on non-weighted least square method for discrete cosine transform (DCT). At last, surface distribution was obtained. The image aquisition of the SiO_2 film and the pre-processing of interferogram was performed.The result indicates that it is consistent with the result measured by Zygo interferometer.