CAJ | 학술논문

采用脉冲激光沉积方法,通过金红石相TiO_2(200)纳米诱导层在蓝宝石衬底上生长了(200)取向的萤石相钇稳定氧化锆(YSZ)薄膜.通过反射式高能电子衍射对薄膜生长过程进行原位监测;用XRD分析进行后位的薄膜结构表征;使用原子力显微镜来观测薄膜的形貌及晶粒大小.结果表明,我们成功地在蓝宝石衬底上外延了具有三重旋转织构的a轴取向萤石相YSZ薄膜,其外延关系为YSZ(200)∥TiO_2(200)∥Al_2O_3(0001);YSZ[010]∥TiO_2[001]∥Al_2O_3[11-20].
채용맥충격광침적방법,통과금홍석상TiO_2(200)납미유도층재람보석츤저상생장료(200)취향적형석상을은정양화고(YSZ)박막.통과반사식고능전자연사대박막생장과정진행원위감측;용XRD분석진행후위적박막결구표정;사용원자력현미경래관측박막적형모급정립대소.결과표명,아문성공지재람보석츤저상외연료구유삼중선전직구적a축취향형석상YSZ박막,기외연관계위YSZ(200)∥TiO_2(200)∥Al_2O_3(0001);YSZ[010]∥TiO_2[001]∥Al_2O_3[11-20].
The (200) preferentially oriented yttria-stablized-zirconia (YSZ) fluorite structured films were grown by pulsed laser deposition on (0001) sapphire substrates,covered with a TiO_2(200) nano buffer 1ayer.The growth was in situ monitored with the reflection high energy electron difiraction;and the microstructures of the as-deposited films were characterized with X-ray diffraction and atomic force microscopy.The results show that the α-axis oriented fluorite YSZ films with smooth and compact surfaces were epitaxially grown on TiO_2 coated sapphire substrate,the in-plane relationships of which are YSZ(200)∥TiO_2(200)∥Al_2O_3(0001) with the in-plane alignment of YSZ[010]∥TiO_2[001]∥Al_2O_3[11-20] with the three rotational variants of the YSZ.