CAJ | 학술논문

以交替真空溅射的方法使用成分分别为MnFe2O4与ZnFe2O4的双靶制备了成分变化的系列Mn1-xZnxFe2O4铁氧体薄膜,衬底为Si(100).薄膜的成分通过控制不同靶的溅射时间来进行调整.沉积态的薄膜呈非晶结构,在真空炉中以适当的温度对薄膜进行退火之后能够得到多晶MnZn铁氧体薄膜.组成成分为Mn0.5ZnO.5Fe2O4的薄膜呈现了相对最高的饱和磁化强度.同时还研究了制备条件对薄膜结构与磁性的影响,如溅射氧分压,退火真空度,退火温度及薄膜厚度等等.制备的薄膜相对于块状材料具有较高的矫顽力,进而讨论了应力对薄膜矫顽力的影响.
이교체진공천사적방법사용성분분별위MnFe2O4여ZnFe2O4적쌍파제비료성분변화적계렬Mn1-xZnxFe2O4철양체박막,츤저위Si(100).박막적성분통과공제불동파적천사시간래진행조정.침적태적박막정비정결구,재진공로중이괄당적온도대박막진행퇴화지후능구득도다정MnZn철양체박막.조성성분위Mn0.5ZnO.5Fe2O4적박막정현료상대최고적포화자화강도.동시환연구료제비조건대박막결구여자성적영향,여천사양분압,퇴화진공도,퇴화온도급박막후도등등.제비적박막상대우괴상재료구유교고적교완력,진이토론료응력대박막교완력적영향.
Mn1-xZnxFe2O4 ferrite films were prepared by alternatively sputtering from two targets with the composition of MnFe2O4 and ZnFe2O4 respectively.The films were deposited on Si(100)substrates and the compositions of the film are modulated by controlling the ratio of the sputtering time from each target.The as-deposited films are amorphous.After being annealed in vacuum furnace at suitable annealing temperature,the polycrystalline Mn-Zn ferrite films were obtained.The films with composition of Mn0.5 ZnO.5Fe2O4 show a maximum saturation magnetization Ms,the effects of fabrication conditions on the film structure and magnetic properties were investigated,such as the sputtering oxygen partial pressure,annealing vacuum pressure and temperature,the thickness of the film and etc.The films show higher coercivity than that of bulk materials.the influence of stress on film(s)coercivity was discussed.