CAJ | 학술논문

设计了一种垂直梳齿驱动的V型扭转梁支撑的微镜器件.采用有限元仿真和解析方法对该器件进行了静态和动态分析.在100V直流电压下,镜面转角可达0.7°,能够满足镜而扫描所需要的起始角.同时对比了不同支撑梁结构下的前五阶模态频率以及前两阶频率比,并分析了不同梁间距以及V型梁夹角下各个参数的变化趋势,得出了使微扭转镜工作在最稳定振型的V型梁倾斜角度,确定了所设计结构的优化尺寸.最后对V型梁的扭转应力进行了分析.
설계료일충수직소치구동적V형뉴전량지탱적미경기건.채용유한원방진화해석방법대해기건진행료정태화동태분석.재100V직류전압하,경면전각가체0.7°,능구만족경이소묘소수요적기시각.동시대비료불동지탱량결구하적전오계모태빈솔이급전량계빈솔비,병분석료불동량간거이급V형량협각하각개삼수적변화추세,득출료사미뉴전경공작재최은정진형적V형량경사각도,학정료소설계결구적우화척촌.최후대V형량적뉴전응력진행료분석.
A scanning micromirror Suspended by a pair of V-shaped beams,driven by vertically electrostatic comb actuators,was designed and modeled.The static and dynamic analysis was carried out by both theory calculation and FEM simulation.The static characteristic shows that a torsion angle of 0.7°can be achieved at 100V DC voltage,which is suffcient for the startup of the mirror scanning operation.Moreover,modal analysis of three types of torsion beams were performed with ANSYS,and the comparison of results reveals that the mirror with V-shaped beams has the most stable torsional mode.The torsional stress are also investigated.