微细加工技术
微細加工技術
미세가공기술
MICROFABRICATION TECHNOLOGY
2001年
1期
26-29,66
,共5页
李红军%卢振武%廖江红%翁志成%王乃强%刘金声
李紅軍%盧振武%廖江紅%翁誌成%王迺彊%劉金聲
리홍군%로진무%료강홍%옹지성%왕내강%류금성
衍射光学元件%离子束刻蚀%菲涅耳透镜%衍射效率
衍射光學元件%離子束刻蝕%菲涅耳透鏡%衍射效率
연사광학원건%리자속각식%비열이투경%연사효솔
由于衍射光学元件独特的色散特性及体积小、重量轻可进行复制等优点,它在国防、生产及科研等领域的作用越来越重要,应用于光学成像系统,不仅能改善系统成像质量,而且能实现系统的轻量化、小型化,增加系统设计的自由度。使用离子束刻蚀法制作的16阶菲涅耳透镜应用于折衍混合CCD相机;测量菲涅耳透镜的衍射效率并分析了影响衍射效率的因素。
由于衍射光學元件獨特的色散特性及體積小、重量輕可進行複製等優點,它在國防、生產及科研等領域的作用越來越重要,應用于光學成像繫統,不僅能改善繫統成像質量,而且能實現繫統的輕量化、小型化,增加繫統設計的自由度。使用離子束刻蝕法製作的16階菲涅耳透鏡應用于摺衍混閤CCD相機;測量菲涅耳透鏡的衍射效率併分析瞭影響衍射效率的因素。
유우연사광학원건독특적색산특성급체적소、중량경가진행복제등우점,타재국방、생산급과연등영역적작용월래월중요,응용우광학성상계통,불부능개선계통성상질량,이차능실현계통적경양화、소형화,증가계통설계적자유도。사용리자속각식법제작적16계비열이투경응용우절연혼합CCD상궤;측량비열이투경적연사효솔병분석료영향연사효솔적인소。
As DOE have special dispersion, small volume, light weight andcan be relicated, it plays more and more important role in national defence, production and science research. Its application in optical imaging system can not only improve imaging quality, but also perform system's lightweight, miniaturization and increase degree of freedom in the design. The 16-step Fresnel lens had been fabricated by ion beam etching and it has been used in refractive-diffractive CCD camera. Its diffractive efficiency is measured and the factors to affect it are analyzed