中国机械工程
中國機械工程
중국궤계공정
CHINA MECHANICAl ENGINEERING
2012年
3期
354-361
,共8页
向东%何磊明%瞿德刚%牟鹏%段广洪
嚮東%何磊明%瞿德剛%牟鵬%段廣洪
향동%하뢰명%구덕강%모붕%단엄홍
旋涂%喷涂%电沉积%光刻工艺
鏇塗%噴塗%電沉積%光刻工藝
선도%분도%전침적%광각공예
spin coating%spray coating%electro-deposition%photolithography
涂胶工艺过程质量的好坏直接影响到光刻工艺的质量,综述了旋转涂胶法和雾化喷涂法两种涂胶方法的工艺特点和研究进展,另外还对电沉积法、气相沉积法等工艺方法进行了简要介绍。对比了旋涂法、喷涂法和电沉积法等涂胶方法的工艺特点,并对不同涂胶工艺方法的应用场合进行了总结。
塗膠工藝過程質量的好壞直接影響到光刻工藝的質量,綜述瞭鏇轉塗膠法和霧化噴塗法兩種塗膠方法的工藝特點和研究進展,另外還對電沉積法、氣相沉積法等工藝方法進行瞭簡要介紹。對比瞭鏇塗法、噴塗法和電沉積法等塗膠方法的工藝特點,併對不同塗膠工藝方法的應用場閤進行瞭總結。
도효공예과정질량적호배직접영향도광각공예적질량,종술료선전도효법화무화분도법량충도효방법적공예특점화연구진전,령외환대전침적법、기상침적법등공예방법진행료간요개소。대비료선도법、분도법화전침적법등도효방법적공예특점,병대불동도효공예방법적응용장합진행료총결。
The quality of the coating of the photoresist impacts the quality of lithography directly.The spin coating and spray coating method and their development process were presented,as well as the electrodeposition（ED）,vapor deposition methods.Advantage and disadvantages of the spin coating,spray coating and ED were outlined,and the applications of the different coating methods were summarized.
