CAJ | 학술논문

采用多弧等离子体辅助物理气相沉积法,在ZL109 铝合金表面沉积了TiN薄膜并对其形貌结构及耐磨性进行了研究.结果表明,在温度较低时TiN薄膜在ZL109铝合金表面生长方式为平面生长模式,随着沉积温度的升高及时间的延长,生长方式向岛状生长模式转化;在沉积温度为280 ℃,时间为1 h时,得到的TiN薄膜厚度在2 μm以上;ZL109铝合金表面沉积TiN薄膜后耐磨性提高约4倍.
채용다호등리자체보조물리기상침적법,재ZL109 려합금표면침적료TiN박막병대기형모결구급내마성진행료연구.결과표명,재온도교저시TiN박막재ZL109려합금표면생장방식위평면생장모식,수착침적온도적승고급시간적연장,생장방식향도상생장모식전화;재침적온도위280 ℃,시간위1 h시,득도적TiN박막후도재2 μm이상;ZL109려합금표면침적TiN박막후내마성제고약4배.
The microstructure and wear-resistant properties of TiN films which were deposited by multi-arc ion plating system on the surface of ZL109 aluminum alloy were investigated. The results reveal that the growth pattern of TiN films deposited on the ZL109 aluminum alloy exhibit planar growth mode at low temperature, which is converted into island mode with increasing in deposition temperature and in time. TiN films with 2 μm in thickness can be observed with deposited at 280 ℃ for 1 hours. After the TiN films deposited on the surface of ZL109 aluminum alloy, the wear-resistant properties are increased about four times, compared with those of the samples with deposited-free.