CAJ | 학술논문

基于非硅表面微加工技术,设计并制造了一种用于振动监测的新型微机电系统(MEMS)冲击开关.开关主要由三部分构成:作为可动电极的质量块,作为同定电极的十字梁,和位于质量块中心的具有延时作用的可动触点.通过ANSYS有限元仿真,对器件进行模态分析,考察了器件的横向抗干扰能力;并提取了器件的物理参数(如弹簧弹性系数和系统有效质量),以用于Simulink动态仿真.通过动态仿真验证了器件的工作原理,并与传统微冲击开关进行了比较.使用落锤试验对所制造出的微冲击开关进行测试,加载脉宽1 ms的半正弦冲击加速度,测得其阈值约为145 g,并且接触时间可稳定在50μs以上.测试结果与仿真符合较好,证明了新型设计可以有效地增强接触效果,所建模型可以较准确地描述器件的动态响应.
기우비규표면미가공기술,설계병제조료일충용우진동감측적신형미궤전계통(MEMS)충격개관.개관주요유삼부분구성:작위가동전겁적질량괴,작위동정전겁적십자량,화위우질량괴중심적구유연시작용적가동촉점.통과ANSYS유한원방진,대기건진행모태분석,고찰료기건적횡향항간우능력;병제취료기건적물리삼수(여탄황탄성계수화계통유효질량),이용우Simulink동태방진.통과동태방진험증료기건적공작원리,병여전통미충격개관진행료비교.사용락추시험대소제조출적미충격개관진행측시,가재맥관1 ms적반정현충격가속도,측득기역치약위145 g,병차접촉시간가은정재50μs이상.측시결과여방진부합교호,증명료신형설계가이유효지증강접촉효과,소건모형가이교준학지묘술기건적동태향응.
A novel shock switch based on a micro-electro-mechanical system (MEMS) for vibration monitoring was designed and fabricated by non-silicon surface micromaching technology. It consisted of three main parts: the proof mass as the movable electrode, the cross beam as the stationary electrode and the movable contact point to prolong the contact time. The ANSYS model was built, by which the modal analysis was carried out showing that the new design reduced the sensitivity to off-axis accelerations compared with the previous design, and the physical parameters were extracted from the structure so they could be used in the Simulink model. Through the dynamic simulation, the contact-enhancing mechanism was verified and compared with the traditional design. The fabricated micro shock switch was tested with a dropping hammer experiment. Test results indicated that the threshold acceleration was about 145g and a stable contact time of over 50μs was observed under a half-sine wave shock load acceleration with 1ms duration, in agreement with the simulation re- sults. The contact effect was improved significantly as expected and the proposed model was able to describe the device's behavior correctly.