光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2010年
1期
156-161
,共6页
李晓韬%程光明%杨志刚%马希里%曾平
李曉韜%程光明%楊誌剛%馬希裏%曾平
리효도%정광명%양지강%마희리%증평
非对称波%惯性冲击%压电双晶片%旋转驱动器
非對稱波%慣性遲擊%壓電雙晶片%鏇轉驅動器
비대칭파%관성충격%압전쌍정편%선전구동기
asymmetric wave%inertial impact%piezoelectric cantilever bimorph%rotated actuator
针对目前压电驱动器主要使用非对称锯齿波电信号驱动压电晶体实现驱动的现状,采用对称电压信号驱动压电振子,设计了非对称夹持式压电旋转驱动器.用对称波电信号作用在压电双晶片振子上,产生正反两个方向大小不同的周期性惯性冲击力,驱动机构实现旋转位移.建立了压电旋转驱动器的动力学模型,分析了非对称夹持旋转驱动器实现大小不同惯性冲击力的原理以及压电旋转驱动器的运动过程.组成了压电旋转驱动器的测试系统,在不同电压幅值、频率的方波激励下,对压电旋转驱动器的平均步长进行了测试.结果表明:非对称夹持式压电旋转驱动器能实现较稳定的单向转动,最大行程为360°,最大承载能力超过300 g,步长分辨率为5 μrad,最大转动速度为4 000 μrad/s;驱动器样机在20 V、2 Hz的方波激励下,平均运动步长为12 μrad,转动速度为24 μrad/s.
針對目前壓電驅動器主要使用非對稱鋸齒波電信號驅動壓電晶體實現驅動的現狀,採用對稱電壓信號驅動壓電振子,設計瞭非對稱夾持式壓電鏇轉驅動器.用對稱波電信號作用在壓電雙晶片振子上,產生正反兩箇方嚮大小不同的週期性慣性遲擊力,驅動機構實現鏇轉位移.建立瞭壓電鏇轉驅動器的動力學模型,分析瞭非對稱夾持鏇轉驅動器實現大小不同慣性遲擊力的原理以及壓電鏇轉驅動器的運動過程.組成瞭壓電鏇轉驅動器的測試繫統,在不同電壓幅值、頻率的方波激勵下,對壓電鏇轉驅動器的平均步長進行瞭測試.結果錶明:非對稱夾持式壓電鏇轉驅動器能實現較穩定的單嚮轉動,最大行程為360°,最大承載能力超過300 g,步長分辨率為5 μrad,最大轉動速度為4 000 μrad/s;驅動器樣機在20 V、2 Hz的方波激勵下,平均運動步長為12 μrad,轉動速度為24 μrad/s.
침대목전압전구동기주요사용비대칭거치파전신호구동압전정체실현구동적현상,채용대칭전압신호구동압전진자,설계료비대칭협지식압전선전구동기.용대칭파전신호작용재압전쌍정편진자상,산생정반량개방향대소불동적주기성관성충격력,구동궤구실현선전위이.건립료압전선전구동기적동역학모형,분석료비대칭협지선전구동기실현대소불동관성충격력적원리이급압전선전구동기적운동과정.조성료압전선전구동기적측시계통,재불동전압폭치、빈솔적방파격려하,대압전선전구동기적평균보장진행료측시.결과표명:비대칭협지식압전선전구동기능실현교은정적단향전동,최대행정위360°,최대승재능력초과300 g,보장분변솔위5 μrad,최대전동속도위4 000 μrad/s;구동기양궤재20 V、2 Hz적방파격려하,평균운동보장위12 μrad,전동속도위24 μrad/s.
The asymmetrical rotated piezoelectric actuator is mainly driven by a sawtooth wave,namely, a kind of asymmetrical wave. On the basis of the ability of symmetrical wave drive and the principle of the converse piezoelectric effect, a design scheme using symmetrical wave to drive the piezoelectric cantilever bimorphs is proposed. The symmetrical wave is acted on the piezoelectric cantilever bimorphs to get inertial impact forces in different directions to drive the rotated actuator to realize the movement. The dynamic model of the rotated actuator is constructed, whose movement principle is also analyzed.An experimental system is built and the rotated actuator's velocity characteristics under different frequencies and voltages are tested. The results show that the asymmetrical rotated piezoelectric actuator realizes a stable and forward direction movement. When the voltage is 20 V and the frequency is 2 Hz square wave, its average step is up to 12 μrad and the rotation velocity is up to 24 μrad/s. The rotated actuator can provide the maximum stroke in 360°, carrying capacity to 300 g, resolving capability in 5 μrad, and rotation velocity in 4 000 μrad/s.