CAJ | 학술논문

采用冷等静压成型(CIP)、低真空烧结和热等静压(HIP)烧结技术制备ZAO靶材,采用排水法、SEM、XRD、光谱发射法(ICPOES)分析了2种烧结方法制备的ZAO靶材的密度、结晶状态和组织成分.结果表明,ZAO细粉经压力造粒后,CIP成型压坯相对密度可达75%以上,该压坯经低真空高温烧结,相对密度达到95%,而采用HIP低温烧结的靶材可达到98%以上,靶材结晶完整,组织成分均匀.
채용랭등정압성형(CIP)、저진공소결화열등정압(HIP)소결기술제비ZAO파재,채용배수법、SEM、XRD、광보발사법(ICPOES)분석료2충소결방법제비적ZAO파재적밀도、결정상태화조직성분.결과표명,ZAO세분경압력조립후,CIP성형압배상대밀도가체75%이상,해압배경저진공고온소결,상대밀도체도95%,이채용HIP저온소결적파재가체도98%이상,파재결정완정,조직성분균균.
In order to improving the density properties of the ZAO targets,the ZAO powders are compacted by cold isostatic pressing(CIP) firstly,and then sintered by rough vacuum sintering technique and hot isostatic pressing(HIP).The density of ZAO targets is tested by Archimedes means,the fracture is observed with scanning electron microscopy(SEM) and the composition is analyzed with inductively coupled plasma optics emission spectrum(ICPOES),the new phase of targets is analyzed by X-ray diffraction pattern(XRD).The results show that the relative density of the green compacts was up to 75%.The relative density of ZAO targets sintered by rough vacuum sintering technique is 95%.The relative density of ZAO targets sintered by HIP exceeds 98% ,which grain structure and components distribution are integral and uniform.