CAJ | 학술논문

用椭偏光谱仪首次在光子能量为2.15.2eV的范围内，测量了不同热处理温度下Ba0.9Sr0.1TiO3(BST)薄膜的椭偏光谱.建立适当的拟合模型，并用Cauchy色散模型描述BST薄膜的光学性质，用最优化法获得了所有样品的光学常数(折射率n和消光系数k)谱及禁带能Eg.比较这些结果，初步得到了BST薄膜的折射率n、消光系数k和禁带能Eg随退火温度变化的变化规律.
용타편광보의수차재광자능량위2.15.2eV적범위내，측량료불동열처리온도하Ba0.9Sr0.1TiO3(BST)박막적타편광보.건립괄당적의합모형，병용Cauchy색산모형묘술BST박막적광학성질，용최우화법획득료소유양품적광학상수(절사솔n화소광계수k)보급금대능Eg.비교저사결과，초보득도료BST박막적절사솔n、소광계수k화금대능Eg수퇴화온도변화적변화규률.
Ellipsometric spectra of Ba0.9Sr0.1TiO3(BST)thin films with various annealing tem-peratures were measured in the range of photon energy from 2.1 to 5.2eV.Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model,their optical constants (refractive index n and extinction coefficient k) spectra and band gap Eg were determined by means of an optimization.Compared these results,we obtained the variation of the refractive index n,the extinction coefficient k and the band gap Eg with annealing temperatures.