The structure and magnetic properties of Fe-N thin films
  • 万方数据
    中国科学A辑(英文版) 중국과학A집(영문판)
    SCIENCE IN CHINA
    2002年 2期 255-263 ,共9页

    周剑平%李丹%顾有松%常香荣%赵春生%李福燊%乔利杰%田中卓%宋庆山%方光旦

    주검평%리단%고유송%상향영%조춘생%리복신%교리걸%전중탁%송경산%방광단



    Fe-N film%magnetron sputtering%magnetic properties


    200 nm Fe-N thin films deposited on glass substrates by RF sputtering were vacuum annealed at 250-350℃ under 12000 A/m magnetic field. Heat treatment was effective in improving the soft magnetic properties of the Fe-N film. When the nitrogen content was in the range of 5-7 at. %,the thin films consisted of α′ + α" after heat treatment and had excellent soft magnetic properties of 4πMs = 2.4 T, Hc ＜ 80 A/m, μr = 1500 under 2-10 MHz. The properties of the films meet the needs of a write head material used in the dual element GMR/inductive heads. The fromation mechanism and lattice constants of the α′ phase in Fe-N thin film are different from Jack's results obtained from γ→α′transformation in bulk samples. The linear relationship between a, c and Ca'N for thin film was obtained asc = 2. 866+ 1.559Ca'N,a = 2.866 + 0.181Ca'N.``
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