CAJ | 학술논문

玻璃毛细管由于它的通光性和真空差分性能被越来越广泛应用于同步辐射光束线中.为了更好地了解毛细管阵列的性能,利用国家同步辐射实验室光谱辐射标准和计量光束线(U26)研究了不同长度和直径比的玻璃毛细管阵列对VUV和软X射线传输效率,并利用该站电离室部分研究了真空差分性能.给出了实验数据.直径实测为134 μm,长度分别为7 mm(L/D=52.2)和19 mm(L/D=141.8)的玻璃毛细管阵列,当光束垂直于截面入射时,其理论计算传输效率都为61%,而实验测得的值分别为44%和24%左右.当低真空端气体压强设为120 Pa时,通过玻璃毛细管阵列后,用TMP110机组抽气时,高真空端真空度为7.6×10~(-2) Pa,其真空差分能力达到1.6×10~3倍.
파리모세관유우타적통광성화진공차분성능피월래월엄범응용우동보복사광속선중.위료경호지료해모세관진렬적성능,이용국가동보복사실험실광보복사표준화계량광속선(U26)연구료불동장도화직경비적파리모세관진렬대VUV화연X사선전수효솔,병이용해참전리실부분연구료진공차분성능.급출료실험수거.직경실측위134 μm,장도분별위7 mm(L/D=52.2)화19 mm(L/D=141.8)적파리모세관진렬,당광속수직우절면입사시,기이론계산전수효솔도위61%,이실험측득적치분별위44%화24%좌우.당저진공단기체압강설위120 Pa시,통과파리모세관진렬후,용TMP110궤조추기시,고진공단진공도위7.6×10~(-2) Pa,기진공차분능력체도1.6×10~3배.
Transmission efficiencies of glass capillary array in different ratios of length to diameter were researched in the spectral regions of VUV and soft X-ray by use of spectral radiation standards and metrology station (U26) in NSRL, and its vacuum differential performance was also researched. The experiment data were diameter is 134 μm, the calculated transmission efficiency of the glass capillary array for two different lengths, 7 mm(L/D=52.2) and 19 mm(L/D=141.8) is the same, about 61%, while the actually measured transmission rate is about 44% and 24%, respectively. When the higher pressure side of the glass capillary array is set at 120 Pa, the pressure on the other side is 7.6×10~(-2) Pa when it is pumped with TMP-110 system, which shows the differential capacity is 1.6×10~3 times.