CAJ | 학술논문

将具有低介电常数的丙烯酸酯树脂作为薄膜晶体管液晶显示器的钝化层整合到阵列基板中.与传统的SiN<,x>薄膜(ε≈7)相比,丙烯酸酯树脂钝化层具有平坦的表面,其低介电常数(ε≈4.5)可以降低器件的RC延迟,这都将有利于提高薄膜晶体管液晶显示器的开口率,从而提高显示器的亮度,降低能耗和制作成本.
장구유저개전상수적병희산지수지작위박막정체관액정현시기적둔화층정합도진렬기판중.여전통적SiN<,x>박막(ε≈7)상비,병희산지수지둔화층구유평탄적표면,기저개전상수(ε≈4.5)가이강저기건적RC연지,저도장유리우제고박막정체관액정현시기적개구솔,종이제고현시기적량도,강저능모화제작성본.
A low dielectric material, acrylate resin has been investigated as a passivation dielectric layer for thin-film transistor (TFT) arrays in this paper. Compared with the con-ventional nitride film (SiN<,x>,ε≈7), the acrylate resin passivation layer exhibits a flat surface and a low dielectric constant (ε≈4. 5) which lowers the RC delay in a device. The high transrnittance and good planarization characteristics of the low dielectric acrylate resin film enhance the brightness and aperture ratio of thin film transistors liquid crystal displays (TFT-LCDs), and lower the manufacture cost.