CAJ | 학술논문

并行共焦显微术能够同时测量多个被测点,大大提高了测量效率,但同时也引入了较大的轴外点像差.已有的数据处理手段不能消除轴外光斑的横向偏移.针对其缺陷,提出了中心扩散法和光强重组法来获取被测光斑的光强位移曲线.实验结果表明,中心扩散法和光强重组法基本消除了轴外点光斑10 μm左右的横向偏移;与现有方法比较,这两种方法还将系统的测量稳定性分别提高了2倍和5倍,满足了并行共焦显微系统高精度快速测量的要求.
병행공초현미술능구동시측량다개피측점,대대제고료측량효솔,단동시야인입료교대적축외점상차.이유적수거처리수단불능소제축외광반적횡향편이.침대기결함,제출료중심확산법화광강중조법래획취피측광반적광강위이곡선.실험결과표명,중심확산법화광강중조법기본소제료축외점광반10 μm좌우적횡향편이;여현유방법비교,저량충방법환장계통적측량은정성분별제고료2배화5배,만족료병행공초현미계통고정도쾌속측량적요구.
Parallel confocal microscopy, which can detect lots of measured points simultaneously, can provide better efficiency in measurement, but bring larger off-axis aberration into the system. The horizontal offset of off-axis facula cannot be eliminated by existing data processing method, so centre-proliferation method and optic-intensity restructuring method are brought up to obtain optic-intensity displacement curves. Experimental results show that the method of centre-proliferation and optic-intensity restructuring can remove horizontal offset of about 10 μm of off-axis facula. In contrast to exiting method, the system's stability has been increased by 2 and 5 times by these two kinds of methods, which can fit the high-precision requirement in rapid measurement.