无机化学学报
無機化學學報
무궤화학학보
JOURNAL OF INORGANIC CHEMISTRY
2004年
11期
1257-1264
,共8页
沈应中%Marion Leschke%Stefan E.Schulz%Ramona Ecke%Thomas Gessner%Heinrich Lang
瀋應中%Marion Leschke%Stefan E.Schulz%Ramona Ecke%Thomas Gessner%Heinrich Lang
침응중%Marion Leschke%Stefan E.Schulz%Ramona Ecke%Thomas Gessner%Heinrich Lang
一价铜%β-二酮%三正丁基膦%化学汽相沉积%热分析%扫描电镜X-射线能量散射
一價銅%β-二酮%三正丁基膦%化學汽相沉積%熱分析%掃描電鏡X-射線能量散射
일개동%β-이동%삼정정기련%화학기상침적%열분석%소묘전경X-사선능량산사
coper(Ⅰ) β-diketonate tri-n-butylphosphine chemical vapour deposition SEM EDX TG DSC
合成了一系列三正丁基膦辅助配体稳定的铜(Ⅰ)β-二酮配合物,对合成的配合物用元素分析、红外、核磁共振以及热重和差热等手段进行了表征.筛选出性能优良的配合物为前驱物用化学汽相沉积(CVD)的方法生长出金属铜膜,用SEM和EDX等手段对生长的铜膜进行了表征.
閤成瞭一繫列三正丁基膦輔助配體穩定的銅(Ⅰ)β-二酮配閤物,對閤成的配閤物用元素分析、紅外、覈磁共振以及熱重和差熱等手段進行瞭錶徵.篩選齣性能優良的配閤物為前驅物用化學汽相沉積(CVD)的方法生長齣金屬銅膜,用SEM和EDX等手段對生長的銅膜進行瞭錶徵.
합성료일계렬삼정정기련보조배체은정적동(Ⅰ)β-이동배합물,대합성적배합물용원소분석、홍외、핵자공진이급열중화차열등수단진행료표정.사선출성능우량적배합물위전구물용화학기상침적(CVD)적방법생장출금속동막,용SEM화EDX등수단대생장적동막진행료표정.
A series of copper(Ⅰ)β-diketonate complexes of type [(nBu3P)mCuL] [m=1 or 2. m=1: L=acac (4), acac=acety lacetonate; L=dbac (5), dbac=1,3-di-tert-butylacetonate; L=hfac (6), hfac=1, 1, 1, 5, 5, 5-hexafluoroacetylaceto nate; m=2: L=acac (7); L=dbac (8); L=hfac (9)] with nBu3P as ancillary Lewis-base ligand is accessible by the reaction of [(nBu3P)mCuCl] (1: m=1, 2: m=2) with the sodium-β-diketonate salts NaL (3a: L=acac; 3b: L=dbac; 3c:L=hfac) in a 1:1 molar ratio. Complexes 7～9 can also be prepared by treatment of 4～6 with one equivalent of
nBu3P (10).Spectroscopic data (IR,1H-,13C{1H}-NMR)of 4～9 reveal that the respective β-diketonates are chelate -bound to copper(Ⅰ), thus resulting in a tri-(4～6) or trtra-coordination (7～9) at the transition metal ion.The thermal properties of 4～9 were studied by ThermoGravimetric anlaysis (TG) and Differential Scanning Calorometry (DSC).Hot -wall Chemical Vapour Deposition experiments (CVD) were carried-out by using ,for example ,complexes 4 and 7 as precursors for the deposition of copper onto TiN-coated SiO2 wafers. SEM and EDX studies were applied to characterize the obained copper films.
