CAJ | 학술논문

针对动物离体组织电生理检测的实际需求,设计并制备了一种以载玻片为基底,以微电板阵列为敏感元件,并将灌流装置集成一体的传感器芯片.采用微电子机械系统(MEMS)技术中的薄膜工艺完成了微电极阵列的制备,其导电层和绝缘层分别是铂和氮化硅.采用聚二甲基硅烷(PDMS)浇铸制成埋有管道的方形灌流槽.该传感器可保持离体组织的生理活性,同时实现电生理信号的64通道同步记录.整个芯片结构紧凑,接口简单,使用方便.对芯片的电学性能进行了研究,结果表明,通过在微电极表面电镀修饰铂黑,可有效降低其交流阻抗,提高信噪比.
침대동물리체조직전생리검측적실제수구,설계병제비료일충이재파편위기저,이미전판진렬위민감원건,병장관류장치집성일체적전감기심편.채용미전자궤계계통(MEMS)기술중적박막공예완성료미전겁진렬적제비,기도전층화절연층분별시박화담화규.채용취이갑기규완(PDMS)요주제성매유관도적방형관류조.해전감기가보지리체조직적생리활성,동시실현전생리신호적64통도동보기록.정개심편결구긴주,접구간단,사용방편.대심편적전학성능진행료연구,결과표명,통과재미전겁표면전도수식박흑,가유효강저기교류조항,제고신조비.
A sensor chip was designed and fabricated on one glass slide substrate which integrated a perfusion device and a microelectrode array as sensitive component. The chip can be used for electrophysiological recording of in vitro animal tissue. The 64-channel microelectrode array had a platinum conductive layer and a silicon nitride insulating layer, which were fabricated by thin-film process of micro electro mechanical systems (MEMS) technology. Poly dimethyl silane (PDMS) was cast to form the square shaped perfusion chamber with pipelines buried inside. The perfusion device can help maintain physical activity of the in vitro tissue during simultaneous recording of the 64-channel electrophysiological signals.The sensor chip has compact structure, simple interface and is easy to use. The electrical performance of the chip was studied, and results show that platinum plating modification can reduce the AC impedance and raise the signal noise ratio effectively.