CAJ | 학술논문

评述氮化铝体单晶生长技术中常用的金属铝直接氮化法、溶解生长法、氢化物气相外延法和物理气相传输法.指出氢化物气相外延法和物理气相传输法是前景看好的生长氮化铝体单晶方法.介绍本课题组对物理气相传输法的一些改进.认为生长大尺寸氮化铝单晶体的研究将集中在精确控制生长条件、选择合适的坩埚材料、优化制备工艺和制备优质氮化铝籽晶等方面.
평술담화려체단정생장기술중상용적금속려직접담화법、용해생장법、경화물기상외연법화물리기상전수법.지출경화물기상외연법화물리기상전수법시전경간호적생장담화려체단정방법.개소본과제조대물리기상전수법적일사개진.인위생장대척촌담화려단정체적연구장집중재정학공제생장조건、선택합괄적감과재료、우화제비공예화제비우질담화려자정등방면.
The research on bulk AlN single-crystal growth was reviewed.Attention Was paid to four AlN crystal growth methods,which were direct nitridation of aluminum,solution growth,hydride vapor phase epitaxy(HVPE)growth,and physical vapor transport(PVT)growth.The technological process of each method is summarized and discussed,with a conclusion that the HVPE and PVT methods may be the most promising methods.Some improvements in the PVT growth technology made by our research team were presented.It is believed that.in order to grow large-size AlN single-crystal,further research should focus on precisely controlling the growth conditions,finding suitable inert crucible materials,finding best technical approach and process sequence,and preparing high-quality native AlN seed.