CAJ | 학술논문

本文研究了复合钒钼酸凝胶薄膜的湿敏特性。复合钒钼酸凝胶薄膜的湿敏性能较复合钒酸好，而且其电阻随相对湿度的增加而减小，添加正硅酸乙酯(TEOS)对其湿滞有明显的改进作用，含5wt%TEOS 的薄膜的湿滞回差最小。同时器件的响应恢复较快。XRD分析表明复合钒钼酸干凝胶薄膜具有层状结构。
본문연구료복합범목산응효박막적습민특성。복합범목산응효박막적습민성능교복합범산호，이차기전조수상대습도적증가이감소，첨가정규산을지(TEOS)대기습체유명현적개진작용，함5wt%TEOS 적박막적습체회차최소。동시기건적향응회복교쾌。XRD분석표명복합범목산간응효박막구유층상결구。
The humidity sensing properties of poly-vanadium-molybdenum acid xerogel thin films are described in this paper.The resistance of the thin films decreases with the increase of the relative humidity.The addition of ethyl silicate (TEOS) has a distinct improvement on the hysterics of the devices.The thin film containing 5wt% TEOS has the lowest hysterics.At the same time the response and the recovery are all quick.The XRD results show that the poly-vanadium-molybdenum acid xerogel thin films have layered structure.