CAJ | 학술논문

　　超短（飞秒）激光脉冲序列技术能有效地提高激光加工金属的加工精度，它在微/纳制造中具有重要的理论意义和生产价值。为了研究脉冲间隔对激光烧蚀金属加工精度的影响，以过渡金属镍为研究对象，采用双温模型和分子动力学模拟相结合的方法，对飞秒激光脉冲序列（脉冲间隔不同）烧蚀金属镍的过程、现象进行了研究，取得了脉冲序列烧蚀镍薄膜的动态表层电子温度和晶格温度随时间演化的数据和烧蚀区域在不同时刻的快照。结果表明，一定范围内，随着脉冲间隔的增加，脉冲序列烧蚀镍薄膜所产生的纳米粒子更加均匀，烧蚀平面更加平整，初始熔化速度、烧蚀率呈降低趋势，有利于提高加工的精度。
　　초단（비초）격광맥충서렬기술능유효지제고격광가공금속적가공정도，타재미/납제조중구유중요적이론의의화생산개치。위료연구맥충간격대격광소식금속가공정도적영향，이과도금속얼위연구대상，채용쌍온모형화분자동역학모의상결합적방법，대비초격광맥충서렬（맥충간격불동）소식금속얼적과정、현상진행료연구，취득료맥충서렬소식얼박막적동태표층전자온도화정격온도수시간연화적수거화소식구역재불동시각적쾌조。결과표명，일정범위내，수착맥충간격적증가，맥충서렬소식얼박막소산생적납미입자경가균균，소식평면경가평정，초시용화속도、소식솔정강저추세，유리우제고가공적정도。
Micromaching by ultrashort laser pulse-train can effectively improve femtosecond laser ablation of metal , which are important both theoretically and practically in micro /nano-laser fabrication applications.In order to study the effect of separation of pulse on the accuracy of laser ablation , the phenomena and process of laser ablation with different separation of pulse train were studied in detail by combining the molecular dynamic simulation and two -temperature model, the electron and lattice temperatures of the layers next to dynamic film surfaces and the snapshots of nickel thin films irradiated by the femtosecond laser pulse trains were obtained .The result is that ,within a certain range, as the increase of the separation of pulse, femtosecond pulse train laser ablation of Ni films can apparently cause more flat ablation plane , slower initial melting speed, smaller and more uniform nanoparticles , smaller ablation ratio,which can effectively improve femtosecond laser ablation of metal .