CAJ | 학술논문

　　为了提高数字灰度光刻系统的焦深，研究了基于点扩散函数稳定性的光瞳编码优化方法，在此基础上综合考虑系统的成像对比度和分辨率，利用工程计算软件MAPLE和光学设计软件ZEMAX设计了一种分辨率为1μm的含有5区相位型光瞳滤波器的长焦深数字灰度光刻系统。结果表明，系统调制传递函数表现出离焦不变性，在保证像方分辨率的前提下，系统的焦深被延拓到原有焦深的2.5倍以上，且在整个焦深空间内系统性能与焦点处保持一致，从而提高了光刻系统的工艺容限。所得实验结果与理论分析一致，说明了设计的可行性。
　　위료제고수자회도광각계통적초심，연구료기우점확산함수은정성적광동편마우화방법，재차기출상종합고필계통적성상대비도화분변솔，이용공정계산연건MAPLE화광학설계연건ZEMAX설계료일충분변솔위1μm적함유5구상위형광동려파기적장초심수자회도광각계통。결과표명，계통조제전체함수표현출리초불변성，재보증상방분변솔적전제하，계통적초심피연탁도원유초심적2.5배이상，차재정개초심공간내계통성능여초점처보지일치，종이제고료광각계통적공예용한。소득실험결과여이론분석일치，설명료설계적가행성。
In order to improve focus depth of digital grayscale lithography , an optimization method of pupil coding was studied based on the stabilization of point spread function .A digital grayscale lithography system with 1μm resolution, long focus depth and five-zone phase pupil filter was designed by using MAPLE and ZEMAX software .The results show that system modulation transfer function has defocus invariance .Under the premise of image resolution stability , the focus depth of the system is extended 2.5 times more than the original focus depth .And then, the system performance within the space of the entire focus depth is consistent with the system performance at the focal point .Thereby, the tolerance of lithography system is increased.The experimental result is the same as the theoretical analysis and the design is feasible .