CAJ | 학술논문

　　硅铝合金非常难以进行切削加工，金刚石刀具被认为是当前切削该类材料的最好工具。考虑到高附着力和好的表面形貌对化学气相沉积(CVD)金刚石涂层的应用具有重要影响，提出了基于热丝化学气相沉积（HFCVD）方法的多层膜技术，并在氮化硅刀具上沉积出多层膜结构的金刚石涂层，微米金刚石(MCD)/纳米金刚石(NCD)结构。为了与多层膜金刚石涂层进行比较，同时制备出单层MCD和NCD涂层。采用场发射电镜(FE?SEM)和拉曼光谱对沉积的金刚石薄膜进行表征。研究了有沉积金刚石涂层和没有涂层的刀具车削硅铝合金的切削性能。结果表明：MCD/NCD多层金刚石涂层表现出优异的耐磨性能，具有较小的后刀面磨损量，涂层无脱落。
　　규려합금비상난이진행절삭가공，금강석도구피인위시당전절삭해류재료적최호공구。고필도고부착력화호적표면형모대화학기상침적(CVD)금강석도층적응용구유중요영향，제출료기우열사화학기상침적（HFCVD）방법적다층막기술，병재담화규도구상침적출다층막결구적금강석도층，미미금강석(MCD)/납미금강석(NCD)결구。위료여다층막금강석도층진행비교，동시제비출단층MCD화NCD도층。채용장발사전경(FE?SEM)화랍만광보대침적적금강석박막진행표정。연구료유침적금강석도층화몰유도층적도구차삭규려합금적절삭성능。결과표명：MCD/NCD다층금강석도층표현출우이적내마성능，구유교소적후도면마손량，도층무탈락。
Aluminum?silicon (Al?Si) alloy is very difficult to machine and diamond tools are considered by far the best choice for the machining of these materials. Experimental results in the machining of the Al?Si alloy with diamond coated inserts are presented. Considering the fact that high adhesive strength and fine surface morphology play an importance role in the applications of chemical vapor deposition (CVD) diamond films, multilayer technique combining the hot filament CVD (HFCVD) method is proposed, by which multilayer diamond-coating on silicon nitride inserts is obtained, microcrystalline diamond (MCD)/nanocrystalline diamond (NCD) film. Also, the conventional monolayer NCD and MCD coated inserts are produced for comparison. The as-deposited diamond films are characterized by field emission scanning electron microscopy (FE-SEM) and Raman spectrum. All the CVD diamond coated inserts and uncoated insert endure the aluminum?silicon alloy turning to estimate their cutting performances. Among all the tested inserts, the MCD/NCD coated insert exhibits the perfect behavior as tool wear due to its very low flank wear and no diamond peeling.