CAJ | 학술논문

　　在集成电路中，稳压二极管的器件结构和工艺方法有很多种，它们的器件特性、工艺特征、工艺控制方法各不相同。文章对各种集成稳压二极管的结构和工艺方法分别进行了分析和研究，包括稳压二极管的反向击穿点、稳定电压的离散性和热稳定性、工艺集成的便捷性、关键工艺控制点等。通过这些研究，总结了这些稳压二极管的器件结构及其工艺方法各自的利弊，为工程人员设计、研究和开发集成有稳压二极管的技术平台提供了一些参考方向。
　　재집성전로중，은압이겁관적기건결구화공예방법유흔다충，타문적기건특성、공예특정、공예공제방법각불상동。문장대각충집성은압이겁관적결구화공예방법분별진행료분석화연구，포괄은압이겁관적반향격천점、은정전압적리산성화열은정성、공예집성적편첩성、관건공예공제점등。통과저사연구，총결료저사은압이겁관적기건결구급기공예방법각자적리폐，위공정인원설계、연구화개발집성유은압이겁관적기술평태제공료일사삼고방향。
In the integrated circuits, there are many types of zener diode device structure and process, their device characteristics, process characteristics, process control methods are different. These zener diode structure and process are analyzed and researched in this paper, including reverse breakdown point of zener diode, stability of Vz, ease of process integration, key process control and etc. By these studies, summarized the pros and cons of the zener diode structure and its process. For engineer in this field, when they design, research and develop the technology platform which integrated zener diode, this paper can provide some reference.