CAJ | 학술논문

文章在大量的文献基础上总结了水溶性有机去膜液的主要成分，包括有机胺、有机溶剂、加速剂、缓蚀剂和消泡剂，并介绍了各种成分在去膜过程中的作用原理。重点介绍应用于去膜液中的各类缓蚀剂及其缓蚀机理，缓蚀剂包括含氮化合物、含硫化合物、有机酸、芳香族羟基化合物等。
문장재대량적문헌기출상총결료수용성유궤거막액적주요성분，포괄유궤알、유궤용제、가속제、완식제화소포제，병개소료각충성분재거막과정중적작용원리。중점개소응용우거막액중적각류완식제급기완식궤리，완식제포괄함담화합물、함류화합물、유궤산、방향족간기화합물등。
In this article, we introduce the organic amine resist strippers, including the main ingredients and their working mechanism. The main ingredients include organic amines, organic solvents, inhibitors, accelerators and defoamers. The emphasis of this article is discussion about different kinds of inhibitors used in the strippers and their anti-corrosive mechanism. Inhibitors used in the strippers are as following:benzotriazole-based compounds, aromatic hydroxy compounds, mercapto group containing compound etc.