CAJ | 학술논문

采用溶胶-凝胶法在 Si(100)衬底上生长了K与N共掺的ZnO 薄膜，并用 X射线衍射仪、扫描电子显微镜、荧光分光光度计、紫外-可见分光光度计对ZnO 薄膜样品的结构和光学特性进行了研究。结果表明，溶胶-凝胶法制备的 ZnO 薄膜为六方纤锌矿结构。随着K掺杂浓度的增大，薄膜的结晶性变好，组成薄膜的颗粒变大，并表现出c 轴择优生长特性，同时掺杂导致的氧空位缺陷也在增加，使得绿光发射增强，薄膜的光学带隙先增后减。
채용용효-응효법재 Si(100)츤저상생장료K여N공참적ZnO 박막，병용 X사선연사의、소묘전자현미경、형광분광광도계、자외-가견분광광도계대ZnO 박막양품적결구화광학특성진행료연구。결과표명，용효-응효법제비적 ZnO 박막위륙방섬자광결구。수착K참잡농도적증대，박막적결정성변호，조성박막적과립변대，병표현출c 축택우생장특성，동시참잡도치적양공위결함야재증가，사득록광발사증강，박막적광학대극선증후감。
The K-N co-doped ZnO films were prepared on Si(100)substrates by sol-gel method.The structure and the optical properties of the ZnO films were investigated by X-ray diffraction,scanning electron microsco-py,photoluminescence and ultraviolet and visible spectrophotometer.The results show that the films exhibit a hexagonal structure.As the concentration of potassium increases,the crystallinity of the films was improved and the grain size increases,showing a preferential growth along c axis.Meanwhile,the increased concentration of K-N doping results in increased oxygen vacancies,enhanced green photoluminescence,and the optical band-gap that increases first and then decreases.