CAJ | 학술논문

采用原子力显微镜(AFM)、扫描电镜(SEM)和X射线衍射仪(XRD)研究工业纯钛经600、700和800℃热氧化后硬化层的形貌、粗糙度和相结构，分析热氧化过程中氧原子的扩散机制、渗氧层的形成和氧化膜的分层现象。结果表明：随着氧化时间的延长和温度的升高，硬化层表面粗糙度增大，氧化物颗粒迅速长大，主要物相为TiO 2、Ti2O、Ti3O、Ti6O；钛的氧化过程是氧原子通过气相/氧化膜及氧化膜/金属基体的渗透过程；氧化膜随着氧化反应的加剧和自身的分解，其结构和性质发生变化而导致分层现象。
채용원자력현미경(AFM)、소묘전경(SEM)화X사선연사의(XRD)연구공업순태경600、700화800℃열양화후경화층적형모、조조도화상결구，분석열양화과정중양원자적확산궤제、삼양층적형성화양화막적분층현상。결과표명：수착양화시간적연장화온도적승고，경화층표면조조도증대，양화물과립신속장대，주요물상위TiO 2、Ti2O、Ti3O、Ti6O；태적양화과정시양원자통과기상/양화막급양화막/금속기체적삼투과정；양화막수착양화반응적가극화자신적분해，기결구화성질발생변화이도치분층현상。
The morphologies, roughness and phase structure of hardened layer of commercial purity titanium (CP-titanium) after thermal oxidation at 600, 700 and 800℃were investigated by AFM, SEM and XRD. The diffusion mechanism, formation of oxygen-diffusion zone and stratification during the thermal oxidation treatment were analyzed. The results show that the roughnesses of hardened layer increase and the oxide particles grow up continually with the increase of oxidation time and temperature, and the main phases are TiO2, Ti2O, Ti3O and Ti6O. The oxidation process of CP-titanium is that oxygen atom passes the gaseous phase/oxidation film and oxidation film/metallic matrix. The structure and property of oxidation film change and lead to stratification due to the acceleration of oxidation reaction and the decomposition of oxidation film.