CAJ | 학술논문

近年来，我们致力于将氚b衰变诱发X射线谱分析（BIXS ）方法发展成为一种准确测量含氚薄膜中氚量及分布的常规方法。该方法结合了蒙特卡罗模拟与 Tikhonov正则法，近期已用于一系列氚化钛薄膜样品总氚量、深度分布的分析。增强质子背散射分析（EPBS ）方法作为一种快速、无损的杂质成分含量及深度分布的分析手段，在本文中被用于该系列氚化钛薄膜样品的分析，并与相应的BIXS结果进行了比较，对分析中的有关问题也进行了讨论。
근년래，아문치력우장천b쇠변유발X사선보분석（BIXS ）방법발전성위일충준학측량함천박막중천량급분포적상규방법。해방법결합료몽특잡라모의여 Tikhonov정칙법，근기이용우일계렬천화태박막양품총천량、심도분포적분석。증강질자배산사분석（EPBS ）방법작위일충쾌속、무손적잡질성분함량급심도분포적분석수단，재본문중피용우해계렬천화태박막양품적분석，병여상응적BIXS결과진행료비교，대분석중적유관문제야진행료토론。
In recent years ,we tried to develop the b-decay induced X-ray spectroscopy (BIXS) into a rou-tine and accurate tritium analysis method for tritium-containing thin films .Most recently ,the BIXS method ,in which the Monte Carlo simulations and the Tikhonov regularization were used ,was applied to analyze the total tritium content and the tritium depth profile in a series of tritium-containing Ti film samples .As a fast and non-destructive method to analyze the content and depth distribution of the impu-rity elements in film samples ,enhanced proton backscattering spectroscopy (EPBS) ,was employed to compare the results with those of BIXS .Some issues during the analysis were also discussed in this pa-per .