CAJ | 학술논문

光谱法是测量光学薄膜光学性能的重要方法之一，能够直接表征薄膜-基底系统的光学特性，如：反射率、透过率和吸收率。通过研究薄膜-基底系统的光传输特性，推导出在基底具有弱吸收的一般条件下薄膜-基底系统反射率、透射率和吸收率的表达式，确定了通过测量单面和双面抛光基底及其薄膜特性间接获得薄膜单面光学特性的方法；在实验中使用Lambda-900分光光度计对熔融石英基底的HfO2薄膜进行了测试，并通过测量误差分析，薄膜的单面反射率误差为1.00%，单面透过率的误差为0.601%。研究结果表明文中方法可适用于各类薄膜单面特性的表征与评价。
광보법시측량광학박막광학성능적중요방법지일，능구직접표정박막-기저계통적광학특성，여：반사솔、투과솔화흡수솔。통과연구박막-기저계통적광전수특성，추도출재기저구유약흡수적일반조건하박막-기저계통반사솔、투사솔화흡수솔적표체식，학정료통과측량단면화쌍면포광기저급기박막특성간접획득박막단면광학특성적방법；재실험중사용Lambda-900분광광도계대용융석영기저적HfO2박막진행료측시，병통과측량오차분석，박막적단면반사솔오차위1.00%，단면투과솔적오차위0.601%。연구결과표명문중방법가괄용우각류박막단면특성적표정여평개。
Spectrum method is one of the important testing technique by which the optical properties (reflectance, transmittance and absorptance) of the thin film-substrate system could be obtained directly. The expressions for reflectance, transmittance and absorptance in case of weak absorption existing in substrate were derived by researching the optical transport characteristics of thin film-substrate system. The optical properties of thin film could be calculated by testing the properties of thin films deposited on single sided polishing substrate and double sided polishing substrate indirectly. HfO2 thin film deposited on fused silica substrate was measured by Lambda-900 spectrophotometer. And the error analysis shows that the error of single side reflectance is 1.00%, however, the error of single side transmittance is about 0.601%. It can be concluded that the characterization and evaluation of various types of single side thin film could be obtained by the method in this paper.