CAJ | 학술논문

采用常温直流磁控溅射法在廉价201无镍不锈钢表面沉积了纯钛薄膜。通过SEM分析了201上钛膜的沉积厚度受沉积条件的影响，也探讨了工艺参数对薄膜沉积量的影响。应用动电位扫描极化曲线测试评估钛膜的耐腐蚀性，据此采用均匀试验设计法优化了钛膜的溅射工艺参数。采用DPS数据处理系统对均匀试验数据进行二次多项式逐步回归分析，发现溅射功率对钛膜耐蚀性的影响可以表述为开口向上的抛物线关系，并获得了膜耐蚀性的优化工艺条件。进一步讨论了沉积膜厚对覆钛不锈钢耐腐蚀性的影响。
채용상온직류자공천사법재렴개201무얼불수강표면침적료순태박막。통과SEM분석료201상태막적침적후도수침적조건적영향，야탐토료공예삼수대박막침적량적영향。응용동전위소묘겁화곡선측시평고태막적내부식성，거차채용균균시험설계법우화료태막적천사공예삼수。채용DPS수거처리계통대균균시험수거진행이차다항식축보회귀분석，발현천사공솔대태막내식성적영향가이표술위개구향상적포물선관계，병획득료막내식성적우화공예조건。진일보토론료침적막후대복태불수강내부식성적영향。
Ti film was deposited at the room temperature by DC magnetron sputtering on low-cost 201 stainless steel free of Ni. The effects of deposition conditions on the thickness of Ti film on 201 stainless steel were analyzed through SEM. Moreover, the effects of parameters on the deposition quantity were discussed. The corrosion resistance of Ti film was evaluated by corrosion current density from potentiodynamic scanning polarization curve, and sputtering parameters was optimized through uniform design method accordingly. Experimental data of uniform design was analyzed by quadratic polynomial stepwise regression method with Data Processing System 7.05 (abbreviated DPS). It was found that the relationship of the sputtering power and corrosion resistance could be expressed as upward parabola, and optimization parameters were acquired on the base of the corrosion resistance. Furthermore, the effect of film thickness on the corrosion resistance was discussed.