CAJ | 학술논문

多晶硅残液中的六氯二硅烷具有高附加值，国外已开展相关研究，而国内这方面研究仍处于空白阶段。对此，本文提出了一种从多晶硅氯硅烷残液回收六氯二硅烷的新工艺。工艺通过采用过滤器与五精馏塔耦合完成残液回收，利用 Aspen Plus 软件对工艺进行了模拟计算，结果表明，本工艺能够有效回收六氯二硅烷，纯度（质量分数）可达99.8%。使用灵敏度分析考察了回流比、进料位置、采出量等对分离效果的影响，确定了最优工艺操作参数。最后评价了工艺的整体经济效应，结果表明本工艺存在很大的潜在效益。
다정규잔액중적륙록이규완구유고부가치，국외이개전상관연구，이국내저방면연구잉처우공백계단。대차，본문제출료일충종다정규록규완잔액회수륙록이규완적신공예。공예통과채용과려기여오정류탑우합완성잔액회수，이용 Aspen Plus 연건대공예진행료모의계산，결과표명，본공예능구유효회수륙록이규완，순도（질량분수）가체99.8%。사용령민도분석고찰료회류비、진료위치、채출량등대분리효과적영향，학정료최우공예조작삼수。최후평개료공예적정체경제효응，결과표명본공예존재흔대적잠재효익。
Hexachlorodisilane in chlorosilane residue from polysilicon production could be a valuable product. Research on this subject abroad has obtained attention from various research institutes,but domestic research does not have much experience in this area. This paper introduced a new process of recycling hexachlorodisilane from chlorosilane residue. The combination of filter and five distillation columns was used in the process,and Aspen Plus software was chosen as the simulation method. The results demonstrated that the process was feasible to recover hexachlorodisilane and the purity can achieve 99.8wt%. The influences of reflux ratio,feed location and product mass rate on the separation effects were investigated using sensitivity analysis. The optimal operational parameters were determined. An economic estimation showed that this process could have considerable potential benefits.