CAJ | 학술논문

中阶梯光栅作为高色散和高分辨率光学器件，已经广泛的应用于大型光谱仪器之中。在中阶梯光栅的刻划过程中，存在刻划误差，这将严重影响光栅衍射性能，最终使得衍射效果产生缺陷。针对此情况，定量分析了中阶梯光栅的刻划误差对衍射光谱、衍射级次、波前误差、鬼线强度、杂散光强度的影响以及提出了一种从衍射效率角度分析刻划误差的方法。在满足一定条件下，求得上述因素对应的刻划误差分别为：1265.8 nm、352 nm、37 nm、112 nm、3.4 nm。这对光栅刻划时限定刻划机的刻划精度提供了直接和重要的参考。
중계제광책작위고색산화고분변솔광학기건，이경엄범적응용우대형광보의기지중。재중계제광책적각화과정중，존재각화오차，저장엄중영향광책연사성능，최종사득연사효과산생결함。침대차정황，정량분석료중계제광책적각화오차대연사광보、연사급차、파전오차、귀선강도、잡산광강도적영향이급제출료일충종연사효솔각도분석각화오차적방법。재만족일정조건하，구득상술인소대응적각화오차분별위：1265.8 nm、352 nm、37 nm、112 nm、3.4 nm。저대광책각화시한정각화궤적각화정도제공료직접화중요적삼고。
Echelle grating is used extensively in spectral instruments owing to its advantages, such as the advanced intrinsic dispersion and resolving power. But while ruling the echelle grating, there may be some periodic components of spacing errors which will seriously affect the performance of grating diffraction and lead to defects of the diffraction effects. In response to this situation, the effect of grating’s line error on diffraction spectrum, diffraction order, wavefront error, the intensity of the rowland ghost line and the intensity of stray light was proposed. What’s more, a method for analyzing the grating’s line error from the aspect of the diffraction efficiency was proposed. Under certain conditions, the ruling errors for meeting every kind of requests are 1 265.8 nm, 352 nm, 37 nm, 112 nm, 3.4 nm respectively, which provides a direct and important reference for the ruling accuracy before ruling an echelle grating.