大学物理实验
大學物理實驗
대학물리실험
PHYSICAL EXPERIMENT OF COLLEGE
2013年
3期
50-54
,共5页
纳米技术%双束%聚焦离子束%聚焦电子束%诱导沉积%刻蚀%三维成像%光刻
納米技術%雙束%聚焦離子束%聚焦電子束%誘導沉積%刻蝕%三維成像%光刻
납미기술%쌍속%취초리자속%취초전자속%유도침적%각식%삼유성상%광각
nanotechnology%dual-beam%focused ion beam%focused electron beam%induced deposition%etching%dimensional imaging%lithography
总结近几年来聚焦电子/离子束双束技术的发展概况和主要应用领域，主要对双束系统的结构、原理及其在刻蚀、沉积、离子注入、显微成像和能谱分析等几方面的应用发展进行介绍，讨论双束技术未来发展的趋势。
總結近幾年來聚焦電子/離子束雙束技術的髮展概況和主要應用領域，主要對雙束繫統的結構、原理及其在刻蝕、沉積、離子註入、顯微成像和能譜分析等幾方麵的應用髮展進行介紹，討論雙束技術未來髮展的趨勢。
총결근궤년래취초전자/리자속쌍속기술적발전개황화주요응용영역，주요대쌍속계통적결구、원리급기재각식、침적、리자주입、현미성상화능보분석등궤방면적응용발전진행개소，토론쌍속기술미래발전적추세。
With the continuing development of nanotechnology to the breadth and depth,focused elec-tron/ion beam technology has been developed rapidly in recent years.As an important micro-nanofab-rication and characterization method,it attracted great attention of the maj ority of scientists.Thus,the dual-beam technology has been used in more and more applications in the latest research.This paper briefly described the application development,the structure and principle of the dual-beam system. What is more,the main application areas in last few years of the dual-beam technology were summa-rized,the trend of the future development of dual-beam technology was discussed.
