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2014年
5期
67-70
,共4页
CO2激光钻%激光盲孔%光束%悬铜%Cu-Direct工艺
CO2激光鑽%激光盲孔%光束%懸銅%Cu-Direct工藝
CO2격광찬%격광맹공%광속%현동%Cu-Direct공예
CO2 Laser Drilling Machine%Laser Blind Hole%Beam%Over Hang%Cu-Direct Process
介绍了一种用CO2激光钻机开铜窗及打盲孔的新工艺，通过变换CO2激光钻机光束直径大小，达到CO2激光钻机开大窗，打小孔，从而控制孔型的目的。此新工艺可减少普通Cu-Direct工艺悬铜过大问题，也可避免干膜蚀刻开铜窗流程长，成本高等问题，针对激光孔孔底开裂失效缺陷也有所改善。
介紹瞭一種用CO2激光鑽機開銅窗及打盲孔的新工藝，通過變換CO2激光鑽機光束直徑大小，達到CO2激光鑽機開大窗，打小孔，從而控製孔型的目的。此新工藝可減少普通Cu-Direct工藝懸銅過大問題，也可避免榦膜蝕刻開銅窗流程長，成本高等問題，針對激光孔孔底開裂失效缺陷也有所改善。
개소료일충용CO2격광찬궤개동창급타맹공적신공예，통과변환CO2격광찬궤광속직경대소，체도CO2격광찬궤개대창，타소공，종이공제공형적목적。차신공예가감소보통Cu-Direct공예현동과대문제，야가피면간막식각개동창류정장，성본고등문제，침대격광공공저개렬실효결함야유소개선。
This paper introduces a new process which mask opening and drill blind hole by CO2 laser drilling machine, through using switch the beam diameter of CO2 laser drilling machine, and achieving large mask opening and drilling tiny blind holes by CO2 laser drilling machine, so as to control the shape of the blind hole on purpose. This new technology can reduce the problem of excessive over hang of Cu-Direct process, avoid long process and expensive cost of mask opening by the dry iflm etching, also improved defects of the bottom of the laser blind hole crack.
