CAJ | 학술논문

在许多新型传感器和微系统中均存在微量流体自动、精确地驱动和控制问题，而这有赖于微小尺度下对流量的精确测量。基于射流振荡原理设计了一种新型的无反馈通道微小尺度流量传感器，采用计算流体动力学(CFD)方法对该流量传感器的测量特性进行了仿真研究。通过观测振荡腔内部流场，分析了振荡器内部流动形态和射流振荡过程。通过对监测点压力变化曲线的分析，获得了不同入口速度下流体振荡频率，建立了流体流速与振荡频率的函数关系。研究结果表明，该微小尺度射流振荡器振荡平稳，主射流切换灵活，在较宽的流速范围内，流速与振荡频率具有线性关系，具有0.3%的较低的相对压力损失并可达到较小的测量下限，易于加工成型。
재허다신형전감기화미계통중균존재미량류체자동、정학지구동화공제문제，이저유뢰우미소척도하대류량적정학측량。기우사류진탕원리설계료일충신형적무반궤통도미소척도류량전감기，채용계산류체동역학(CFD)방법대해류량전감기적측량특성진행료방진연구。통과관측진탕강내부류장，분석료진탕기내부류동형태화사류진탕과정。통과대감측점압력변화곡선적분석，획득료불동입구속도하류체진탕빈솔，건립료류체류속여진탕빈솔적함수관계。연구결과표명，해미소척도사류진탕기진탕평은，주사류절환령활，재교관적류속범위내，류속여진탕빈솔구유선성관계，구유0.3%적교저적상대압력손실병가체도교소적측량하한，역우가공성형。
The accurate driving and automatical control of micro-fluid exists in many sensors and MEMS, which relies on the precise flowrate measurement in microscale. A new fluidic oscillator without feedback channel is proposed as the flowrate sensor in microscale tubes. A computational fluid dynamics( CFD) method is employed to study the measurement characteristics of the flow sensor. The inner flow distribution and oscillating procedure in chamber are analyzed qualitatively through the investigation of flow fields. The oscillation frequencies are obtained under different inlet velocities by the analysis of the pressure fluctuation in the preset points and then the functional relationship is established between the flow velocity and oscillation frequency. Simulation results indicate that the microscale fluidic flow sensor oscillates stably and the main jet switches side by side flexibly. The linear relationship between velocities and oscillation frequency can be obtained in a relatively wide measurement range,and the sensor has 0. 3% relative pressure loss,the small lower measuring limitation and fabricates easily.