CAJ | 학술논문

利用镜像异质三周期光子晶体的介观压光效应，用其来代替传统压阻式加速度传感器中的压敏电阻膜，设计出一种新型的高灵敏度加速度传感器。该加速度传感器采用四端固定梁结构，有效地消除了偏轴效应，具有很好的稳定性，在室温下其可测量的加速度范围为0~137gn。利用ANSYS软件对所设计的光子晶体加速度传感器进行静态分析和模态分析。可以看出在悬臂梁根部具有最大的应变值，而且第一模态频率与其他模态频率相差较大，可以有效降低交叉耦合。将光子晶体置于悬臂梁根部具有最大的感应灵敏度。这种加速度计具有很大的优势运用到以后的航天，军事等领域。
이용경상이질삼주기광자정체적개관압광효응，용기래대체전통압조식가속도전감기중적압민전조막，설계출일충신형적고령민도가속도전감기。해가속도전감기채용사단고정량결구，유효지소제료편축효응，구유흔호적은정성，재실온하기가측량적가속도범위위0~137gn。이용ANSYS연건대소설계적광자정체가속도전감기진행정태분석화모태분석。가이간출재현비량근부구유최대적응변치，이차제일모태빈솔여기타모태빈솔상차교대，가이유효강저교차우합。장광자정체치우현비량근부구유최대적감응령민도。저충가속도계구유흔대적우세운용도이후적항천，군사등영역。
This paper employs mesoscopic calender effect of mirror Heterotrimer periodic photonic crystal to design a new type of high-sensitivity acceleration sensor and it replaces the pressure-sensitive resistive film of traditional pie-zoresistive acceleration sensor. This acceleration sensor uses four-terminal fixed beam structure and effectively eliminates the off-axis effects. Futher it also has good stability and the measurable acceleration range is 0~137 gn at room temperature. Static analysis and modal analysis are tested by ANSYS software for the design of photonic crystal acceleration sensor. It can be seen that the sensor has a maximum value of strain in the root of the cantilever and the first modal frequency is different from other three modal frequencies, thus it can effectively reduce the cross-coupling. The photonic crystal is placed in the root of the cantilever to have a maximum sensitivity of the sensor. The accelerometer has a great advantage to apply to the aerospace and military fields.