CAJ | 학술논문

微沟道传热技术是当前国际传热领域研究的前沿，在大功率半导体激光器列阵、大型计算机芯片冷却等领域具有广泛的应用前景。为了克服有成熟加工技术的硅微沟道导热系数不高的缺陷，解决普通铜沟道机械加工技术中加工切向应力对沟道壁的破坏无法获得小于300μm的沟道壁以及机械加工后毛刺对制冷流体工质阻力极大的问题，对导热系数更高的铜微沟道的沟道加工工艺进行了研究。利用机械雕刻和化学腐蚀相结合的方法，获得一种简单的机械-化学二次加工工艺，实现了对铜微沟道的精密加工，满足微沟道壁薄、沟道光滑的技术要求，且价格便宜、制作工艺简单。
미구도전열기술시당전국제전열영역연구적전연，재대공솔반도체격광기렬진、대형계산궤심편냉각등영역구유엄범적응용전경。위료극복유성숙가공기술적규미구도도열계수불고적결함，해결보통동구도궤계가공기술중가공절향응력대구도벽적파배무법획득소우300μm적구도벽이급궤계가공후모자대제랭류체공질조력겁대적문제，대도열계수경고적동미구도적구도가공공예진행료연구。이용궤계조각화화학부식상결합적방법，획득일충간단적궤계-화학이차가공공예，실현료대동미구도적정밀가공，만족미구도벽박、구도광활적기술요구，차개격편의、제작공예간단。
The micro-channel heat conduction was the leading edge of international transfer heat search field.There are good prospects cooling for high power diode laser array&large computer CPU and so on.In order to overcome the drawback,poor material conductivity of silicon micro-channel in which processing technologies are well established,this paper has searched for a new processing tech-nical to manufacture high conductivity copper micro-channel.The purpose was solving the problem that mechanical stress caused damage to the wall of micro-channel so that less than 300μm channel could not be made in common machine and the burr by handling would block up the channel.We uti-lized union mechanical-sculpture &chemical-etch method to obtain a simple machine-chemistry cou-ple processing technique to make accurate copper micro-channel which satisfy the technical require-ment of channel’s wall thin and smooth.Furthermore,the price is inexpensive,and manufacturing is easy.