CAJ | 학술논문

提出了一种电容式微机械陀螺仪信号检测方案。该方案与将信号调制到高频后再检测的方案不同，所提方案只需在质量块上加一稳定直流电压，然后与敏感前端CV转换电路相连接，完成电容变化信号到电压信号的检测，因此，简化了电路结构，并且可以消除静态检测电容不相等所造成的误差和获得较低的等效输入噪声。对所设计的电路进行了简要介绍，并且对电路噪声性能进行了分析与推导，在Cadence环境下，基于标准0.25μm COMS工艺模型，对电路进行设计和仿真，显示该电路可达1.2 aF的电容分辨率。
제출료일충전용식미궤계타라의신호검측방안。해방안여장신호조제도고빈후재검측적방안불동，소제방안지수재질량괴상가일은정직류전압，연후여민감전단CV전환전로상련접，완성전용변화신호도전압신호적검측，인차，간화료전로결구，병차가이소제정태검측전용불상등소조성적오차화획득교저적등효수입조성。대소설계적전로진행료간요개소，병차대전로조성성능진행료분석여추도，재Cadence배경하，기우표준0.25μm COMS공예모형，대전로진행설계화방진，현시해전로가체1.2 aF적전용분변솔。
A capacitive readout circuit for micro-machined capacitive gyroscope is presented. Unlike the commonly used methods which need a high frequency carrier to modulate the signal to high frequency,this work applies a high DC voltage on the proof mass of the gyroscope sensor to make the circuit structure simpler and more flexible. In addition,the proposed circuit is able to cancellthe DC offset which caused by capacitance mismatch, lower the output noise. The total readout circuit will be discussed, and the noise performance is studied from a theoretical point of view. The circuit is designed based on standard 0. 25 μm COMS process,under Cadence environment,the design is simulated and a capacitance resolution of 1. 2 aF is achieved.