CAJ | 학술논문

设计的一种大量程加速度传感器敏感单元采用一对双端固支结构,实现硅平面内加速度的测量,通过马歇特锤冲击测试试验和Hopkinson杆激光干涉冲击测试,分别标定了传感器的灵敏度和动态响应,试验结果表明：测试传感器的灵敏度为0.126μV/gn,工作频带为21.46 kHz,工作频带的动态重复性为3.9%,能够满足实际的测试需求,为实现单芯片集成三独立质量块结构的三轴加速度传感器提供了参考依据。
설계적일충대량정가속도전감기민감단원채용일대쌍단고지결구,실현규평면내가속도적측량,통과마헐특추충격측시시험화Hopkinson간격광간섭충격측시,분별표정료전감기적령민도화동태향응,시험결과표명：측시전감기적령민도위0.126μV/gn,공작빈대위21.46 kHz,공작빈대적동태중복성위3.9%,능구만족실제적측시수구,위실현단심편집성삼독립질량괴결구적삼축가속도전감기제공료삼고의거。
A high range accelerometer with a pair of double-clamped beam-mass structure can measure in-plan accel-eration. Machete hammer and Hopkinson bar are used to test the sensitivity and the dynamic response of the sensor. The results show that the sensitivity of the sensor is 0. 126 μV/gn,working frequency is 21. 46 kHz,the dynamic repeatability of working band is 3. 9%,meeting the actual requirements. To achieve triaxial accelerometerthe sensors on single-chip integration of three independent mass structure the reference data are provided.